HAMBURG, GERMANY

April 16 - 18, 2024

Day 1

8:30 - 9:00

Registration

In front of Auditorium - Level 1

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9:00 - 9:15

Opening & Keynote

In front of Auditorium - Level 1

Opening

  • Jochen Kinauer (CamLine)

Opening

  • Martin Schellenberger (Fraunhofer IISB)

Keynote: A silcon symphonie

  • Frank Bösenberg
  • , Silicon Saxony

9:15 - 10.00

Session 1 – Part 1

In front of Auditorium - Level 1

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  • 1.
  • 12

Future Innovation Process in Semiconductor Manufacturing Towards Sustainable & Resilient Production & Products (FIRes)

  • Heinz Schneider
  • , Coca Cola
  • 1.
  • 13

Spectral Clustering Algorithm for Real-Time Plasma Etching Process Monitoring using Optical Emission Spectra

  • Dr. Stephan Müller

10.00 - 10.30

Coffee Break

In front of Auditorium - Level 1

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